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Disilane

Disilane

CVD Gas for Silicon Film Formation

Mitsui Chemicals, Inc.

Product Overview

General Name

CVD Gas for Silicon Film Formation

Product / Grade Name

Disilane

Maker Name

Mitsui Chemicals, Inc.

Function(s)

  • Surface Treatment  >  Silicone Film Formation

End Use(s)

  • Electrical/Electronic Applications
  • Semiconductor Process Materials

Feature(s)

  • Degradability
  • Pyrophoric

Hazard Classification

  • UN Number

    :

  • IMGD Class

    :

  • Packing Group

    :

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Disilane

CVD Gas for Silicon Film Formation

Mitsui Chemicals, Inc.